Feb 23 2007
Aviza Technology，Inc。, a supplier of advanced semiconductor capital equipment and process technologies for the global semiconductor industry and related markets, today announced a follow-on shipment of its Sigma® fxP™ physical vapor deposition (PVD) system to a leading U.S.-based supplier of devices for the communications market. The system will be used for production scale manufacturing of bulk acoustic wave (BAW) devices, primarily for use in the mobile communications market.
“We are very pleased to receive this repeat order from a leading manufacturer of BAW devices,” said Kevin Crofton, Vice President and General Manager, PVD/CVD/Etch Business Unit of Aviza Technology, Inc. “We believe the leading manufacturers in this industry sector are beginning to see BAW filter development as a key component in the RF MEMS market. Aviza continues to be at the forefront in the development and commercialization of BAW applications, and we believe we have a strong position in this market segment with our growing installed base of BAW capital equipment, including our Sigma systems installed in Europe, the U.S. and Asia.”
屡获殊荣的SIGMA FXP是一个专为大容量PVD处理而设计的单晶圆簇工具，具有高吞吐量的良好过程控制。它是一种高度灵活的系统，支持各种处理室配置和组合，以解决各种特定应用。沉积过程模块基于标准设计，可实现简单的技术升级和晶圆大小转换。Sigma FXP的主要应用包括用于子0.35微米节点装置的钛/氮化钛（Ti / TiN）衬里和铝（Al）互连，包括用于钨（W）-plug，非常厚的电动装置的电离的PVD衬里的电离PVD衬里以及高度均匀的氮化铝（ALN），用于凸刀装置和薄膜头。
Achieving excellent film uniformity for improved yield and growing the correct crystal structure, or texture, is critical for BAW processing. The Sigma fxP is designed to offer production-proven hardware and process technologies to deliver optimum uniformity and texture requirements that are fundamental to BAW manufacturers.